发明授权
- 专利标题: Apparatus and method for evaluating orientation film
- 专利标题(中): 用于评估取向膜的装置和方法
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申请号: US305905申请日: 1994-09-13
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公开(公告)号: US5532488A公开(公告)日: 1996-07-02
- 发明人: Mitsuru Ishibashi , Hideyuki Sasaki , Tatsuo Nomaki , Akira Tanaka , Rei Hasegawa
- 申请人: Mitsuru Ishibashi , Hideyuki Sasaki , Tatsuo Nomaki , Akira Tanaka , Rei Hasegawa
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX5-227072 19930913; JPX5-228465 19930914; JPX5-353763 19931229
- 主分类号: G01N21/21
- IPC分类号: G01N21/21 ; G02F1/1337 ; G01J4/00
摘要:
An orientation film evaluating apparatus and a rubbing processing apparatus by which the orientation capability for a liquid crystal orientation film can be measured quantitatively with high sensitivity and accuracy even during an actual production process, and an orientation condition is controlled precisely so as to obtain a stable production condition and to improve productivity and yield therefor. The orientation film evaluating apparatus includes: a unit for radiating infrared light; a polarizing portion which polarizes the infrared at varied angles to an orientation film, and for irradiating the polarized infrared lights to the orientation film; a detection portion which detects infrared light reflected upon the orientation film; and an evaluating portion which obtains a difference of absorbance of infrared light detected by the detection portion with respect to a polarized direction of the orientation film, and which evaluates an orientation capability of the orientation film.
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