发明授权
US5539551A LCD TFT drain and source electrodes having ohmic barrier, primary
conductor, and liquid impermeable layers and method of making
失效
具有欧姆屏障,初级导体和液体不可渗透层的LCD TFT漏极和源电极及其制造方法
- 专利标题: LCD TFT drain and source electrodes having ohmic barrier, primary conductor, and liquid impermeable layers and method of making
- 专利标题(中): 具有欧姆屏障,初级导体和液体不可渗透层的LCD TFT漏极和源电极及其制造方法
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申请号: US168644申请日: 1993-12-16
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公开(公告)号: US5539551A公开(公告)日: 1996-07-23
- 发明人: Tsutomu Nomoto , Hideki Kamada , Ichiro Ohno
- 申请人: Tsutomu Nomoto , Hideki Kamada , Ichiro Ohno
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Casio Computer Co., Ltd.,Oki Electric Industry Co., Ltd.
- 当前专利权人: Casio Computer Co., Ltd.,Oki Electric Industry Co., Ltd.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX4-347601 19921228; JPX4-347602 19921228
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; G02F1/136 ; G02F1/1343 ; H01L29/04 ; H01L31/036
摘要:
A plurality of address wiring layers and a plurality of data wiring layers are arranged to cross each other at a right angle. TFTs are respectively arranged at the intersections between the address wiring layers and the data wiring layers. The gate electrode of each TFT is connected to an address wiring layer for each row. The drain electrode of each TFT is connected to a data wiring layer for each column. Display electrodes are respectively arranged in the regions defined by the address wiring layers and the data wiring layers, and are connected to the source electrodes of the TFTs arranged in the respective regions. The data wiring layers and the source and drain electrodes of the TFTs each comprise the first layer serving as an ohmic barrier layer for a semiconductor layer, the second layer forming of a conductive material and serving as a main signal wiring layer, and the third layer serving as a battery reaction preventing layer.
公开/授权文献
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