发明授权
US5552342A Method for producing a contact hole in a semiconductor device using
reflow and etch
失效
使用回流和蚀刻在半导体器件中制造接触孔的方法
- 专利标题: Method for producing a contact hole in a semiconductor device using reflow and etch
- 专利标题(中): 使用回流和蚀刻在半导体器件中制造接触孔的方法
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申请号: US293247申请日: 1994-08-19
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公开(公告)号: US5552342A公开(公告)日: 1996-09-03
- 发明人: Hiroyasu Itou , Tosiyuki Morisita , Takanori Simamoto
- 申请人: Hiroyasu Itou , Tosiyuki Morisita , Takanori Simamoto
- 申请人地址: JPX Kariya
- 专利权人: Nippondenso Co., Ltd.
- 当前专利权人: Nippondenso Co., Ltd.
- 当前专利权人地址: JPX Kariya
- 优先权: JPX5-206263 19930820
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/302 ; H01L21/3065 ; H01L21/768
摘要:
An LOCOS film is formed on an Si substrate, a gate oxide film and a gate electrode are formed thereon, and source/drain impurities are ion implanted into the Si substrate using the gate electrode as a mask. Then, a BPSG film is formed at a film density of 1.8 g/cm.sup.3 or more. A recessed part is formed in the BPSG film by the first photolithographic process with an etching depth of 20% or more but under 100% of the thickness of the BPSG film. Thereafter, the BPSG film is fluidized by reflow treatment to shape a part which is to be a contact hole into a funnel with an "upwards convex" curvature. Finally, the part formed into the funnel is etched to make a contact hole. As a result, wiring disconnection within the contact hole can be prevented, the diffusion depth controllability for the source/drain impurities can be improved, and the fall in the impurity density in the source/drain surface can be prevented.