Invention Grant
- Patent Title: Force sensor and a method for manufacturing a force sensor
- Patent Title (中): 力传感器和制造力传感器的方法
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Application No.: US303099Application Date: 1994-09-08
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Publication No.: US5553506APublication Date: 1996-09-10
- Inventor: Gerhard Benz , Franz Laermer , Andrea Schilp , Erich Zabler , Jurgen Schirmer , Werner Uhler
- Applicant: Gerhard Benz , Franz Laermer , Andrea Schilp , Erich Zabler , Jurgen Schirmer , Werner Uhler
- Applicant Address: DEX Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DEX Stuttgart
- Priority: DEX4333099.1 19930929
- Main IPC: G01L1/10
- IPC: G01L1/10 ; G01L9/00 ; G01P15/08 ; G01P15/097 ; G01P15/10 ; H01L29/84 ; G01L1/00
Abstract:
In a force sensor, a resonator is mounted by means of a dielectric layer on a bending element. Deformation of the bending element changes the resonant frequency of the resonator.
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