发明授权
- 专利标题： Wafer suspension box
- 专利标题（中）： 晶圆悬挂箱
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申请号： US425259申请日： 1995-04-18
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公开(公告)号： US5555981A公开(公告)日： 1996-09-17
- 发明人: Barry Gregerson
- 申请人： Barry Gregerson
- 申请人地址： MN Chanhassen
- 专利权人： Empak, Inc.
- 当前专利权人： Empak, Inc.
- 当前专利权人地址： MN Chanhassen
- 主分类号： H01L21/673
- IPC分类号： H01L21/673 ; B65D85/90
摘要：
A ridged, transparent, thermoplastic package for transporting disk products such as wafers, semi-conductor wafers or computer memory disks is disclosed. Elastomeric or flexible thermoplastic cushions hold the disk products in a manner which precludes them from becoming damaged during normal shipping and handling. The cushions have a plurality of disk engaging members which individually engage a disk. The disk engaging member conforms to the edge profile of the substrate wafer to securely hold the wafer. Wafer rotation is eliminated, particle generation is reduced and the cushions securely hold the disk products.
公开/授权文献
- US4990919A Missile decoy system 公开/授权日：1991-02-05
信息查询
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