发明授权
US5557123A Nonvolatile semiconductor memory device with shaped floating gate
失效
具有形状浮动栅极的非易失性半导体存储器件
- 专利标题: Nonvolatile semiconductor memory device with shaped floating gate
- 专利标题(中): 具有形状浮动栅极的非易失性半导体存储器件
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申请号: US319605申请日: 1994-10-07
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公开(公告)号: US5557123A公开(公告)日: 1996-09-17
- 发明人: Noriyuki Ohta
- 申请人: Noriyuki Ohta
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-253011 19931008
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792 ; G11C11/34
摘要:
A nonvolatile semiconductor memory device with improved writing characteristics. The memory device has memory cell transistors arranged in rows and columns. The memory cell transistors belonging to the same column share a source region and a drain region, and a channel region is disposed between the source and drain regions. The interval between the source and drain regions is the isolation width. Each of the memory cell transistors has a floating gate electrode disposed on the channel region with a first gate insulating film and a control gate electrode disposed on the floating gate electrode with a second gate insulating film. The floating gate electrode does not have a constant width and has a portion narrower than the isolation width which is free from the floating gate electrode. The narrower portion is typically formed as a constricted portion of the floating gate electrode.
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