A method for post-cleaning finish drying is provided, by which finish drying of industrial parts can be conducted without leaving residues or corroding the cleaned material. In this method, finish drying can be performed without the use of freon being a cause of destruction of the ozonosphere. Preferably, a cleaned material is dipped (rinsed) in a low molecular weight siloxane having a content of organic compounds, such as dodecamethylpentasiloxane, of less than 0.01% by weight, taken out and dried. Also, preferably, the material rinsed with the low molecular weight siloxane is subjected to a vapor cleaning using a perfluorocarbon compound.