发明授权
- 专利标题: Method of making a mask for making integrated circuits
- 专利标题(中): 制造集成电路掩模的方法
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申请号: US37050申请日: 1993-03-25
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公开(公告)号: US5567550A公开(公告)日: 1996-10-22
- 发明人: Michael C. Smayling
- 申请人: Michael C. Smayling
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F7/00 ; G03F7/09 ; H01L51/00 ; H01L51/30 ; H01L51/40 ; H05K1/16 ; G03F9/00
摘要:
A transistor device 10 is disclosed herein. A doped layer 14 of a radiation sensitive material is formed over a substrate 12. The radiation sensitive material 14 may be polyimide, polybenzimidazole, a polymer, an organic dielectrics, a conductor or a semiconductor and the substrate 12 may be silicon, quartz, gallium arsenide, glass, ceramic, metal or polyimide. A neutral (undoped) layer 16 of radiation sensitive material is formed over the doped layer 14. First and second source/drain regions 18 and 20 are formed in the neutral layer 16 and extend to a top portion of the doped layer 14. A gate region 22 is formed in a top portion of the neutral layer 16 between the first source/drain region 18 and second source/drain region 20 such that a channel region 24 is formed in the doped layer 14 beneath the gate region 22.
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