发明授权
US5572036A Support element for an automatic load platform of a silicon wafer
exposure unit
失效
用于硅晶片曝光单元的自动负载平台的支撑元件
- 专利标题： Support element for an automatic load platform of a silicon wafer exposure unit
- 专利标题（中）： 用于硅晶片曝光单元的自动负载平台的支撑元件
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申请号： US492066申请日： 1995-09-11
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公开(公告)号： US5572036A公开(公告)日： 1996-11-05
- 发明人: Andreas Gakis , Ralph Busskamp
- 申请人： Andreas Gakis , Ralph Busskamp
- 申请人地址： NY New York
- 专利权人： U.S. Philips Corporation
- 当前专利权人： U.S. Philips Corporation
- 当前专利权人地址： NY New York
- 优先权： DEX4339818.9 19931123
- 主分类号： G03F9/00
- IPC分类号： G03F9/00 ; G03F7/20 ; H01L21/027 ; H01L21/683 ; H01L21/687 ; H01L21/68
摘要：
A support element of an automatic load platform of a silicon wafer exposure unit, having a circular cross-section, with a first outer diameter adapted to the guide of a load station, which diameter is smaller than that of a silicon wafer, wherein the circular disc of the support element has at its circumference in a direction parallel to the insertion direction of the load station at least partly enlarged portions and therewith a second outer diameter which corresponds approximately to that of the silicon wafer, and wherein the greatest width of the support element at right angles to the insertion direction corresponds to that of the circular disc.
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