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US5573890A Method of optical lithography using phase shift masking 失效
使用相移屏蔽的光学光刻方法

Method of optical lithography using phase shift masking
摘要:
A method of performing poly level lithography in manufacturing an integrated circuit using a phase shift mask in a step and repeat optical tool where the phase assignment for said phase shift mask is determined by a technique which determines, without assignment conflict, the Intersection of the gate pattern with the active gate pattern and which divides the Intersection into categories of stacks where a slightly different phase assignment rule is employed for the different stacks.
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