发明授权
- 专利标题: Method of optical lithography using phase shift masking
- 专利标题(中): 使用相移屏蔽的光学光刻方法
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申请号: US276734申请日: 1994-07-18
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公开(公告)号: US5573890A公开(公告)日: 1996-11-12
- 发明人: Christopher A. Spence
- 申请人: Christopher A. Spence
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F7/20 ; G03F9/00 ; H01L21/027
摘要:
A method of performing poly level lithography in manufacturing an integrated circuit using a phase shift mask in a step and repeat optical tool where the phase assignment for said phase shift mask is determined by a technique which determines, without assignment conflict, the Intersection of the gate pattern with the active gate pattern and which divides the Intersection into categories of stacks where a slightly different phase assignment rule is employed for the different stacks.
公开/授权文献
- US6103568A Manufacturing method of cylindrical stacked electrode 公开/授权日:2000-08-15
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