发明授权
- 专利标题： Method of manufacturing a solar cell by formation of a zinc oxide transparent conductive layer
- 专利标题（中）： 通过形成氧化锌透明导电层制造太阳能电池的方法
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申请号： US401992申请日： 1995-03-10
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公开(公告)号： US5578501A公开(公告)日： 1996-11-26
- 发明人: Mitsuyuki Niwa
- 申请人： Mitsuyuki Niwa
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-272092 19910924; JPX3-272093 19910924
- 主分类号： H01L31/0224
- IPC分类号： H01L31/0224 ; H01L31/075 ; H01L31/20 ; H01L31/18 ; C23C14/34
摘要：
A solar cell has a semiconductor layer sandwiched between first and second electrodes, wherein a zinc oxide layer containing carbon atoms, nitrogen atoms, or carbon and nitrogen atoms is located between the semiconductor layer and at least one of the first and second electrodes. The density of carbon atoms, nitrogen atoms, or carbon and nitrogen atoms in the zinc oxide layer is constant or continuously changed within the range of 5 atm % or less.
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