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US5593734A Multiple inlet flow distributor for liquids 失效
液体多入口流量分配器

Multiple inlet flow distributor for liquids
摘要:
A liquid flow distribution apparatus for forming highly uniform liquid layers on substrates without stagnation within a flow distribution cavity of the apparatus. A primary cavity has a primary inlet means and a plurality of secondary inlet conduits which terminate in angled secondary ports in the cavity wall. Each of the secondary ports is angled away from the primary inlet means. The apparatus can be used under varying rheological conditions.
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