Invention Grant
- Patent Title: Monolithic resonator for vibrating beam force sensors
- Patent Title (中): 用于振动梁力传感器的单片谐振器
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Application No.: US315045Application Date: 1994-09-29
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Publication No.: US5596145APublication Date: 1997-01-21
- Inventor: William C. Albert , Herbert T. Califano
- Applicant: William C. Albert , Herbert T. Califano
- Applicant Address: NJ Morris Township, Morris County
- Assignee: AlliedSignal Inc.
- Current Assignee: AlliedSignal Inc.
- Current Assignee Address: NJ Morris Township, Morris County
- Main IPC: G01L1/16
- IPC: G01L1/16 ; G01L9/00 ; G01P15/097 ; G01P15/10 ; G01P15/09
Abstract:
A monolithic resonator for a vibrating beam device, either an accelerometer or a pressure transducer, includes an outer structure and an inner structure. The outer structure includes a mounting structure, a proof mass or pressure transfer structure and a plurality of flexure beams parallel for the accelerometer and perpendicular for the pressure transducer, extending between the mounting and either proof mass or pressure transfer structure. The inner structure is connected to the outer structure and contains isolator masses, isolator beams and a vibrating beam. The outer structure has a thickness greater than the intermediate thickness of the isolator masses which is in turn thicker than the inner structure thickness of the isolator beams and vibrating beam. The intermediate thickness is independently selected to achieve the ideal mass requirements of the vibration isolation mechanism.
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