发明授权
- 专利标题： Method and apparatus for measuring the distribution of elements contained in sample
- 专利标题（中）： 用于测量样品中所含元素分布的方法和装置
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申请号： US529288申请日： 1995-09-15
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公开(公告)号： US5596195A公开(公告)日： 1997-01-21
- 发明人: Kenichi Obori , Atsushi Bando , Toshikazu Yurugi
- 申请人： Kenichi Obori , Atsushi Bando , Toshikazu Yurugi
- 申请人地址： JPX Kyoto
- 专利权人： Horiba, Ltd.
- 当前专利权人： Horiba, Ltd.
- 当前专利权人地址： JPX Kyoto
- 优先权： JPX6-248845 19940916
- 主分类号： G01N23/225
- IPC分类号： G01N23/225 ; H01J37/256 ; H01J37/00
摘要：
An apparatus and method of identifying substances contained in a sample to both identify the elements in the sample and to measure a distribution of the elements are provided. The sample is scanned with electron beams to form X-ray images of two or elements. These X-ray images can be used to form a scattering diagram, and the composition of known materials can be plotted on the scattering diagram. The substances contained in the samples can be identified, and the distribution of the substances can be obtained by comparing the data on the scattering diagram with the plot.
公开/授权文献
- US5090879A Recirculating rotary gas compressor 公开/授权日：1992-02-25