发明授权
- 专利标题: Position detecting apparatus based on before and after mode-hop signals
- 专利标题(中): 基于前后模式跳信号的位置检测装置
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申请号: US365240申请日: 1994-12-28
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公开(公告)号: US5600442A公开(公告)日: 1997-02-04
- 发明人: Isao Minegishi , Hiroyuki Kawashima , Susumu Saito
- 申请人: Isao Minegishi , Hiroyuki Kawashima , Susumu Saito
- 申请人地址: JPX
- 专利权人: Kabushiki Kaisha TOPCON
- 当前专利权人: Kabushiki Kaisha TOPCON
- 当前专利权人地址: JPX
- 优先权: JPX5-355224 19931229
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B9/02 ; G01D5/26
摘要:
A position detecting apparatus comprises a light emitter which activates a laser source to emit a light beam so that mode hopping occurs, an interference optical system which directs the light beam from the laser source to a measuring light path on which an object to be measured is located and a reference light path on which a reflection mirror is placed and merges the reflected light beams coming back on the light paths so that the reflected light beams interfere with each other, a light sensor which receives the interference light beam provided by the interference optical system, and a position detector which determines the position of the object of measurement based on the interference signals produced by the light sensor before and after mode hopping caused by the light emitter.
公开/授权文献
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