发明授权
- 专利标题: Device for transporting wafer magazines
- 专利标题(中): 晶片传送装置
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申请号: US406976申请日: 1995-04-03
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公开(公告)号: US5601484A公开(公告)日: 1997-02-11
- 发明人: Erich Adler , Marlies Mages
- 申请人: Erich Adler , Marlies Mages
- 申请人地址: DEX Jena
- 专利权人: Jenoptik GmbH
- 当前专利权人: Jenoptik GmbH
- 当前专利权人地址: DEX Jena
- 优先权: DEX4326309.7 19930805
- 主分类号: B65G49/07
- IPC分类号: B65G49/07 ; H01L21/677 ; F24F3/16
摘要:
In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.
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