发明授权
- 专利标题: Microcomponent sheet architecture
- 专利标题(中): 微组件板结构
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申请号: US282663申请日: 1994-07-29
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公开(公告)号: US5611214A公开(公告)日: 1997-03-18
- 发明人: Robert S. Wegeng , M. Kevin Drost , Carolyn E. McDonald
- 申请人: Robert S. Wegeng , M. Kevin Drost , Carolyn E. McDonald
- 申请人地址: WA Richland
- 专利权人: Battelle Memorial Institute
- 当前专利权人: Battelle Memorial Institute
- 当前专利权人地址: WA Richland
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; B01B1/00 ; B01F5/06 ; B01F13/00 ; B01J19/00 ; F01K13/00 ; F02C7/08 ; F25B9/00 ; F28D1/03 ; F28D9/00 ; F28D15/02 ; F28F1/00 ; F28F3/08 ; H01L23/473 ; H05K7/20 ; F25B1/00 ; F28F7/00
摘要:
The invention is a microcomponent sheet architecture wherein macroscale unit processes are performed by microscale components. The sheet architecture may be a single laminate with a plurality of separate microcomponent sections or the sheet architecture may be a plurality of laminates with one or more microcomponent sections on each laminate. Each microcomponent or plurality of like microcomponents perform at least one unit operation. A first laminate having a plurality of like first microcomponents is combined with at least a second laminate having a plurality of like second microcomponents thereby combining at least two unit operations to achieve a system operation.
公开/授权文献
- US5958800A Method for post planarization metal photolithography 公开/授权日:1999-09-28
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