Invention Grant
US5616061A Fabrication process for direct electron injection field-emission display
device
失效
直接电子注入场致发射显示装置的制造工艺
- Patent Title: Fabrication process for direct electron injection field-emission display device
- Patent Title (中): 直接电子注入场致发射显示装置的制造工艺
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Application No.: US498507Application Date: 1995-07-05
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Publication No.: US5616061APublication Date: 1997-04-01
- Inventor: Michael D. Potter
- Applicant: Michael D. Potter
- Applicant Address: NY Rochester
- Assignee: Advanced Vision Technologies, Inc.
- Current Assignee: Advanced Vision Technologies, Inc.
- Current Assignee Address: NY Rochester
- Main IPC: H01J9/02
- IPC: H01J9/02 ; H01J31/12 ; H01J1/53
Abstract:
A lateral-emitter electron field-emission display device structure incorporates a thin-film emitter having an emitting edge and extending into in direct contact with a non-conducting or very high resistivity phosphor, thereby eliminating the gap between the emitter and the phosphor. Such a gap has been a part of all field-emission display devices in the prior art. The ultra-thin-film lateral emitter of the new structure is deposited in a plane parallel to the device's substrate and has an inherently small radius of curvature at its emitting edge. A fabrication process specially adapted to make the new structure includes a directional trench etch, which both defines the emitting edge and provides an opening to receive a non-conducting phosphor. This phosphor covers an anode and is automatically aligned in contact with the emitter edge. When an electrical bias voltage is applied between the emitter and anode, electrons are injected directly into the phosphor material from the emitter edge, exciting cathodoluminescence in the phosphor to emit light which is visible in a wide range of viewing angles. With minor variations in the fabrication process, a lateral-emitter electron field emission display device may be made with an extremely small emitter-phosphor gap, having a width less than 100 times the thickness of the ultra-thin emitter. Embodiments in which the gap width is zero are characterized as edge-contact light-emitting diodes (or triodes or tetrodes if they include control electrodes).
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