发明授权
- 专利标题: Top floating-gate flash EEPROM structure
- 专利标题(中): 顶部浮栅闪存EEPROM结构
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申请号: US500104申请日: 1995-07-10
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公开(公告)号: US5625213A公开(公告)日: 1997-04-29
- 发明人: Gary Hong , Chen-Chiu Hsue
- 申请人: Gary Hong , Chen-Chiu Hsue
- 申请人地址: TWX Hsin-Chu
- 专利权人: United Microelectronics Corporation
- 当前专利权人: United Microelectronics Corporation
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8247 ; H01L29/788
摘要:
A method for forming, and a resultant structure of, a top floating gate FLASH EEPROM cell are described. There is a first insulating structure over a silicon substrate, whereby the first insulating structure is a gate oxide. A first conductive structure is formed over the first insulating structure, whereby the first conductive structure is a control gate. There is a first insulating layer over the surfaces of the first conductive structure, whereby the first insulating layer is an interpoly dielectric. There is a second conductive structure formed over the first insulating layer and over a portion of the silicon substrate adjacent to the first insulating structure, whereby the second conductive structure is a floating gate. A second insulating layer is formed between the silicon substrate and the second conductive structure, whereby the second insulating layer is a tunnel oxide. Active regions in the silicon substrate, implanted with a conductivity-imparting dopant, are formed under the second insulating layer but are horizontally a distance from the first insulating structure.
公开/授权文献
- US4986349A Heat exchanger 公开/授权日:1991-01-22
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