Invention Grant
- Patent Title: Substrate transport apparatus and substrate transport path adjustment method
- Patent Title (中): 基板输送装置和基板输送路径调整方法
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Application No.: US485178Application Date: 1995-06-07
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Publication No.: US5628605APublication Date: 1997-05-13
- Inventor: Hideaki Miyoshi
- Applicant: Hideaki Miyoshi
- Applicant Address: JPX Tokyo
- Assignee: Kaijo Corporation
- Current Assignee: Kaijo Corporation
- Current Assignee Address: JPX Tokyo
- Main IPC: B65G49/07
- IPC: B65G49/07 ; H01L21/00 ; H01L21/677
Abstract:
A substrate transport path adjustment apparatus allows adjustment of the transport path of a substrate by placing a magazine between regulating members for regulating the position of the magazine provided roughly in a straight line with respect to guide members which guide a substrate along a prescribed path. The magazine is positioned with respect to the prescribed path by moving both regulating members in synchronization in the same direction after the regulating members engage the magazine by approaching each other. The substrate is pushed out from the magazine to bring the substrate between the guide members, and the guide members are driven to approach the substrate. Both guide members are moved in synchronization in the same direction to position the substrate with respect to the prescribed path.
Public/Granted literature
- US5048340A Semi-automatic system for ultrasonic measurement of texture Public/Granted day:1991-09-17
Information query
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