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US5628605A Substrate transport apparatus and substrate transport path adjustment method 失效
基板输送装置和基板输送路径调整方法

Substrate transport apparatus and substrate transport path adjustment
method
Abstract:
A substrate transport path adjustment apparatus allows adjustment of the transport path of a substrate by placing a magazine between regulating members for regulating the position of the magazine provided roughly in a straight line with respect to guide members which guide a substrate along a prescribed path. The magazine is positioned with respect to the prescribed path by moving both regulating members in synchronization in the same direction after the regulating members engage the magazine by approaching each other. The substrate is pushed out from the magazine to bring the substrate between the guide members, and the guide members are driven to approach the substrate. Both guide members are moved in synchronization in the same direction to position the substrate with respect to the prescribed path.
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