发明授权
US5647574A Multi-layer microvalve having integral closure, membrane and pressure
compensating surface forming a middle layer
失效
具有整体闭合的多层微型阀，形成中间层的膜和压力补偿表面
- 专利标题： Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer
- 专利标题（中）： 具有整体闭合的多层微型阀，形成中间层的膜和压力补偿表面
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申请号： US360652申请日： 1994-12-16
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公开(公告)号： US5647574A公开(公告)日： 1997-07-15
- 发明人: Michael Mettner , Armin Schuelke , Christian Doering , Thomas Schittny
- 申请人： Michael Mettner , Armin Schuelke , Christian Doering , Thomas Schittny
- 申请人地址： DEX Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DEX Stuttgart
- 优先权： DEX4221089.5 19920626
- 主分类号： F16K31/02
- IPC分类号： F16K31/02 ; F15C5/00 ; F16K31/06 ; F16K99/00
摘要：
The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.