发明授权
US5656186A Method for controlling configuration of laser induced breakdown and
ablation
失效
用于控制激光诱发击穿和消融的配置的方法
- 专利标题: Method for controlling configuration of laser induced breakdown and ablation
- 专利标题(中): 用于控制激光诱发击穿和消融的配置的方法
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申请号: US224961申请日: 1994-04-08
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公开(公告)号: US5656186A公开(公告)日: 1997-08-12
- 发明人: Gerard A. Mourou , Detao Du , Subrata K. Dutta , Victor Elner , Ron Kurtz , Paul R. Lichter , Xinbing Liu , Peter P. Pronko , Jeffrey A. Squier
- 申请人: Gerard A. Mourou , Detao Du , Subrata K. Dutta , Victor Elner , Ron Kurtz , Paul R. Lichter , Xinbing Liu , Peter P. Pronko , Jeffrey A. Squier
- 申请人地址: MI Ann Arbor
- 专利权人: The Regents of the University of Michigan
- 当前专利权人: The Regents of the University of Michigan
- 当前专利权人地址: MI Ann Arbor
- 主分类号: A61B18/20
- IPC分类号: A61B18/20 ; A61F9/008 ; B23K26/00 ; B23K26/06 ; B23K26/36 ; B23K26/38 ; B23K26/40 ; H01S3/00 ; B23K26/02
摘要:
In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.