发明授权
- 专利标题: Fabrication of thermal ink-jet feed slots in a silicon substrate
- 专利标题(中): 在硅衬底中制造热喷墨进料槽
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申请号: US532439申请日: 1995-09-22
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公开(公告)号: US5658471A公开(公告)日: 1997-08-19
- 发明人: Ashok Murthy , Lawrence Russell Steward , Charles Spencer Whitman
- 申请人: Ashok Murthy , Lawrence Russell Steward , Charles Spencer Whitman
- 申请人地址: KY Lexington
- 专利权人: Lexmark International, Inc.
- 当前专利权人: Lexmark International, Inc.
- 当前专利权人地址: KY Lexington
- 主分类号: B41J2/05
- IPC分类号: B41J2/05 ; B41J2/16 ; B44C1/22 ; H01L21/00
摘要:
Improved methods for fabricating the ink feed slots in silicon substrate for use in thermal ink-jet print heads is disclosed. One method involves the partial anisotropic etching of an ink feed slot in a silicon substrate for use in aligning the electrical resistive elements on one surface of the substrate. Another embodiment involves laser drilling alignment holes and anisotropically etching the substrate. In both methods, at least one photoresist masking and development step is eliminated thereby reducing fabrication time and alignment difficulties for locating the feed slots relative to the electrical resistance elements and increasing product yield.
公开/授权文献
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