发明授权
- 专利标题: Optical encoder with dual diffraction gratings
- 专利标题(中): 具有双衍射光栅的光学编码器
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申请号: US504708申请日: 1995-07-20
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公开(公告)号: US5661295A公开(公告)日: 1997-08-26
- 发明人: Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito
- 申请人: Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito
- 申请人地址: JPX Kadoma
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Kadoma
- 优先权: JPX6-176848 19940728
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01D5/38 ; G02B5/18 ; G02B27/42 ; G03F9/00 ; G01B9/02 ; H01J3/12
摘要:
An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a second diffraction grating for further diffracting the light beam diffracted by the first diffraction grating; a reflector for reflecting the light beam from the second grating plate so as to allow the light beam to reenter the second grating plate; and a light-receiving portion for receiving the light beam reflected by the reflector and successively diffracted by the second and first grating plates, wherein a diffraction angle of plus and minus first-order diffracted light beams of the first diffraction grating is substantially equal to that of the plus and minus first-order diffracted light beams of the second diffraction grating, and the light-receiving portion generates an electric signal in accordance with the amount of the plus and minus first-order diffracted light beams of the first diffraction grating.
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