发明授权
- 专利标题: TaN/NiFe/TaN anisotropic magnetic sensor element
- 专利标题(中): TaN / NiFe / TaN各向异性磁传感元件
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申请号: US527471申请日: 1995-09-13
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公开(公告)号: US5667879A公开(公告)日: 1997-09-16
- 发明人: Michael J. Haji-Sheikh
- 申请人: Michael J. Haji-Sheikh
- 申请人地址: MN Minneapolis
- 专利权人: Honeywell Inc.
- 当前专利权人: Honeywell Inc.
- 当前专利权人地址: MN Minneapolis
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; B32B9/00
摘要:
A stack of two refractory nitride layers and a magnetoresistive layer are used to facilitate electrical connection between components of a sensor. The stack of tantalum nitride and nickel iron layers are disposed over a silicide layer that is, in turn, disposed on a diffusion of conductive material within the body of a silicon layer. A titanium tungsten layer is disposed on the stack and below a subsequent layer of a conductive metal such as aluminum. A silicon nitride passivation layer is disposed over all of the other layers.
公开/授权文献
- US5004629A Transfer tube 公开/授权日:1991-04-02