发明授权
- 专利标题: FET having a dielectrically isolated gate connect
- 专利标题(中): 具有介电隔离栅极的FET连接
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申请号: US435119申请日: 1995-05-05
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公开(公告)号: US5677554A公开(公告)日: 1997-10-14
- 发明人: Stanley E. Swirhun
- 申请人: Stanley E. Swirhun
- 申请人地址: MN Minneapolis
- 专利权人: Honeywell Inc.
- 当前专利权人: Honeywell Inc.
- 当前专利权人地址: MN Minneapolis
- 主分类号: H01L21/335
- IPC分类号: H01L21/335 ; H01L21/76 ; H01L29/778 ; H01L31/0328
摘要:
A HIGFET having a gate with a pad which is isolated from the FET heterostructure wafer by a dielectric layer to minimize leakage current between the gate and the wafer. The method of production of this device involves application of the gate metal only over the active area of the FET and a photo resist covering on the gate metal. The wafer, including the area covered by the photo resist, is covered with the dielectric layer. The photo resist layer is removed along with the dielectric layer from over the gate metal. Another layer of gate metal is formed on the preexisting gate metal including a gate pad on part of the remaining dielectric layer.
公开/授权文献
- US4948096A Valve stem and gasket with improved cleaning capability 公开/授权日:1990-08-14
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