发明授权
- 专利标题: X-ray generating apparatus and X-ray microscope
- 专利标题(中): X射线发生装置和X射线显微镜
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申请号: US587915申请日: 1996-01-17
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公开(公告)号: US5680429A公开(公告)日: 1997-10-21
- 发明人: Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
- 申请人: Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
- 申请人地址: JPX Kyoto JPX Wako
- 专利权人: Shimadzu Corporation,The Institute of Physical & Chemical Research
- 当前专利权人: Shimadzu Corporation,The Institute of Physical & Chemical Research
- 当前专利权人地址: JPX Kyoto JPX Wako
- 优先权: JPX7-005465 19950118; JPX7-005477 19950118
- 主分类号: G21K7/00
- IPC分类号: G21K7/00 ; H05G2/00
摘要:
An X-ray generating apparatus generates X-rays from plasma formed by irradiating a laser beam to a target. The apparatus includes an X-ray transmitting film disposed at at least one side of the target with a predetermined gap provided therebetween. The X-ray transmitting film has a thickness such that the film is not broken due to an action in the X-ray generating process. The X-rays are taken out through the X-ray transmitting film. An X-ray microscope can employ such an X-ray generating apparatus, with the X-rays from the apparatus being guided to the sample, with the sample to be observed being disposed in the vicinity of the X-ray transmitting film, and with a detecting device for detecting an X-ray image formed by X-rays transmitted through the sample.
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