发明授权
- 专利标题： Stage device and pattern transfer system using the same
- 专利标题（中）： 舞台装置和图案转印系统使用相同
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申请号： US275428申请日： 1994-07-15
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公开(公告)号： US5684856A公开(公告)日： 1997-11-04
- 发明人: Hirohito Itoh , Shinji Ohishi , Kazunori Iwamoto , Nobushige Korenaga , Youzou Fukagawa , Toshiya Asano , Satoru Takahashi
- 申请人： Hirohito Itoh , Shinji Ohishi , Kazunori Iwamoto , Nobushige Korenaga , Youzou Fukagawa , Toshiya Asano , Satoru Takahashi
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-238214 19910918; JPX4-077559 19920331; JPX5-032053 19930222
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F9/00 ; H01J37/20 ; H05G1/00
摘要：
A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.
公开/授权文献
- US4928662A Skid plate for cutting unhardened concrete 公开/授权日：1990-05-29
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