Invention Grant
- Patent Title: Method and apparatus for drying objects using aerosols
- Patent Title (中): 使用气溶胶干燥物体的方法和装置
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Application No.: US616165Application Date: 1996-03-14
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Publication No.: US5685086APublication Date: 1997-11-11
- Inventor: Gary W. Ferrell
- Applicant: Gary W. Ferrell
- Assignee: Ferrell; Gary W.
- Current Assignee: Ferrell; Gary W.
- Main IPC: B08B3/10
- IPC: B08B3/10 ; B08B3/12 ; F26B5/00 ; F26B21/14 ; H01L21/00 ; H01L21/306 ; F26B19/00
Abstract:
Method and apparatus for drying objects that may have been wetted in a manufacturing The objects are submerged in a rinse liquid in an enclosed chamber, and aerosol particles from a selected drying liquid are introduced into the chamber above the rinse liquid surface, forming a thin film on this surface. As the rinse liquid is slowly drained, some aerosol particles settle onto and form a film on the exposed surfaces of the objects, and displace and remove rinse liquid residues from the exposed surfaces. Surface contaminants are also removed by this process.
Public/Granted literature
- US5198451A Heterocyclic carboxylic acids Public/Granted day:1993-03-30
Information query
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