发明授权
- 专利标题： Substrate holding device and manufacturing method therefor
- 专利标题（中）： 基板保持装置及其制造方法
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申请号： US568767申请日： 1995-12-07
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公开(公告)号： US5685363A公开(公告)日： 1997-11-11
- 发明人: Koichi Orihira , Yasunori Ando , Hiroshi Inami
- 申请人： Koichi Orihira , Yasunori Ando , Hiroshi Inami
- 申请人地址： JPX Kyoto
- 专利权人： Nissin Electric Co., Ltd.
- 当前专利权人： Nissin Electric Co., Ltd.
- 当前专利权人地址： JPX Kyoto
- 优先权： JPX6-331948 19941208
- 主分类号： G02F1/13
- IPC分类号： G02F1/13 ; C23C14/50 ; G02F1/1333 ; H01J37/317 ; H01L21/00 ; H01L21/265 ; H01L21/302 ; H01L21/3065 ; H01L21/683 ; F28F23/00
摘要：
A substrate holding device of the invention includes a base cooled with a heat absorbing fluid, a flexible sheet being extended on a surface of the base for forming a sealed portion between the sheet and the base, a heat absorbing fluid with which the sealed portion is filled, a sheet-like rubber elastic material being disposed on the sheet, and a substrate retainer for pressing fringes of a substrate, placed on the rubber elastic material, against the base. Metal elastic members may be distributed almost uniformly in the sealed portion, in place of or together with, the rubber elastic material.
公开/授权文献
- US5082082A Multi-purpose service vehicle 公开/授权日：1992-01-21
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