发明授权
- 专利标题: High refractive-index IR transparent window with hard, durable and antireflective coating
- 专利标题(中): 高折射率红外透明窗,硬质耐用和抗反射涂层
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申请号: US459475申请日: 1995-06-02
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公开(公告)号: US5688608A公开(公告)日: 1997-11-18
- 发明人: Rung-Ywan Tsai , Fang Chuan Ho
- 申请人: Rung-Ywan Tsai , Fang Chuan Ho
- 申请人地址: TWX Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TWX Hsinchu
- 主分类号: C23C14/06
- IPC分类号: C23C14/06 ; C23C14/54 ; G02B1/11 ; B32B15/00
摘要:
A hard and durable single-layer or multilayer artireflection coating for use with a high refractive-index IR transparent substrate is provided. The coating is prepared by concurrent deposition of TiO.sub.2 and MgF.sub.2 with the reactive ion-assistance on the IR transparent substrate within a single vacuum chamber. The refractive-index of this film is adjustable by varying the relative deposition rate of the two materials (i.e. controlling the ratio of the materials) to optimize the transmittance of the incident IR irradiation. The opitical thickness of each film of the single-layer and multilayer antireflection coatings is one-quarter wavelength of the IR irradiation.
公开/授权文献
- US4968897A Automatic by-pass switching device 公开/授权日:1990-11-06
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