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US5696589A Optical caliper with compensation for specimen deflection and method 失效
具有补偿样品偏转和方法的光学钳

Optical caliper with compensation for specimen deflection and method
摘要:
An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
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