发明授权
- 专利标题: Optical caliper with compensation for specimen deflection and method
- 专利标题(中): 具有补偿样品偏转和方法的光学钳
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申请号: US650674申请日: 1996-05-20
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公开(公告)号: US5696589A公开(公告)日: 1997-12-09
- 发明人: Bruce E. Bernacki
- 申请人: Bruce E. Bernacki
- 申请人地址: TN Oak Ridge
- 专利权人: Lockheed Martin Energy Systems, Inc.
- 当前专利权人: Lockheed Martin Energy Systems, Inc.
- 当前专利权人地址: TN Oak Ridge
- 主分类号: G01B11/06
- IPC分类号: G01B11/06
摘要:
An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
公开/授权文献
- US4634463A Vegetable activator and method for manufacturing same 公开/授权日:1987-01-06
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