发明授权
- 专利标题: Electrostatically operated micromechanical capacitor
- 专利标题(中): 静电操作微机电容器
-
申请号: US517221申请日: 1995-08-21
-
公开(公告)号: US5696662A公开(公告)日: 1997-12-09
- 发明人: Paul E. Bauhahn
- 申请人: Paul E. Bauhahn
- 申请人地址: MN Minneapolis
- 专利权人: Honeywell Inc.
- 当前专利权人: Honeywell Inc.
- 当前专利权人地址: MN Minneapolis
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; H01G5/04 ; H01G5/06 ; H01G5/18
摘要:
An electrostatically controlled, micromachined micromechanical capacitor having an adjustable, extensive tuning range. A configuration consists of a set of various sized beams or plates adjacent to a common plate or plates. The pairs of plates are linearly moved relative to each other to provide an adjustable capacitance. The movement of the plates is caused electrostatically by an application of a DC or low frequency voltage to the respective plates. The signals that are processed by these micromechanical capacitors are typically in the megahertz range and higher. The process for micromachining the micromechanical capacitor is similar to the process utilized in integrated circuit fabrication.
公开/授权文献
信息查询