发明授权
- 专利标题： Apparatus for forming multiple cavity products
- 专利标题（中）： 用于形成多个腔体产品的装置
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申请号： US530500申请日： 1995-09-19
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公开(公告)号： US5707480A公开(公告)日： 1998-01-13
- 发明人: Raschid Jose Bezama , John Ulrich Knickerbocker , Govindarajan Natarajan , Joseph Gang Zhou
- 申请人： Raschid Jose Bezama , John Ulrich Knickerbocker , Govindarajan Natarajan , Joseph Gang Zhou
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： H01L21/48
- IPC分类号： H01L21/48 ; B32B31/04 ; B32B31/20
摘要：
The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.
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