- 专利标题: Procedure and facility for handling and transport of wafers in ultra-clean rooms
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申请号: US641274申请日: 1996-04-30
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公开(公告)号: US5718552A公开(公告)日: 1998-02-17
- 发明人: Hartmut Grutzediek , Joachim Scheerer
- 申请人: Hartmut Grutzediek , Joachim Scheerer
- 专利权人: Gruetzediek; Hartmut,Scheerer; Joachim
- 当前专利权人: Gruetzediek; Hartmut,Scheerer; Joachim
- 优先权: DEX4309092.3 19930322
- 主分类号: B65G49/07
- IPC分类号: B65G49/07 ; F24F3/16 ; H01L21/00 ; H01L21/677
摘要:
A technique for handling discs, such as wafers for integrated circuits, which must be processed in ultra-clean rooms and which are transported to various workstations for processing. A horizontally extended rail has storage positions therealong where standard commercial carriers are positioned which contain vertically standing wafers. A lifting device can lift any carrier over neighboring carriers and moves it to a carrying basket located on an extension of the rail. The carrying basket is then turned by 90.degree. so that the vertical wafers lie horizontally. A tongue-shaped device can be moved under any of these wafers for removal thereof from the basket and subsequent transport to a workstation, and return.
公开/授权文献
- US5206715A Circuit for separating luminance and chrominance signals 公开/授权日:1993-04-27