发明授权
- 专利标题： Drip chemical delivery method and apparatus
- 专利标题（中）： 滴剂化学输送方法和装置
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申请号： US617434申请日： 1996-03-18
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公开(公告)号： US5723019A公开(公告)日： 1998-03-03
- 发明人: Wilbur C. Krusell , Lane L. Larson
- 申请人： Wilbur C. Krusell , Lane L. Larson
- 申请人地址： CA San Jose
- 专利权人： OnTrak Systems, Incorporated
- 当前专利权人： OnTrak Systems, Incorporated
- 当前专利权人地址： CA San Jose
- 主分类号： B08B7/00
- IPC分类号： B08B7/00 ; H01L21/00
摘要：
A drip chemical delivery system used in semiconductor substrate cleaning processes. A drip chemical delivery system which uses small openings in a pipe (holes) and a low air pressure to saturate the brushes in a double sided brush system. This drip delivery system reduces the volumes of chemical solutions used in a scrubbing process and helps to maintain control of the pH profile of a substrate. This system is described and illustrated in the manner it is used in conjunction with a double sided scrubber.