- 专利标题: Dicing saw alignment for array ultrasonic transducer fabrication
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申请号: US570223申请日: 1995-12-11
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公开(公告)号: US5730113A公开(公告)日: 1998-03-24
- 发明人: Douglas Glenn Wildes , Kenneth Brakeley Welles, II , William Paul Kornrumpf
- 申请人: Douglas Glenn Wildes , Kenneth Brakeley Welles, II , William Paul Kornrumpf
- 申请人地址: NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: NY Schenectady
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; H01L21/78 ; B28D1/04
摘要:
An array ultrasonic transducer precursor includes a body of piezoelectric material with a dielectric substrate bonded to a surface of the body. Circuit elements supported on the dielectric substrate include, in an active region, physically parallel signal conductors arranged in a pattern with spaces between adjacent ones of the conductors. Dicing saw cuts made in these spaces define individual circuit elements within the piezoelectric body. The circuit elements outside the active region include a set of resistive alignment elements in predetermined positions with reference to the pattern of signal conductors. The transducer precursor is mounted in a dicing saw fixture, and initial cuts made with the dicing saw remove portions of the resistive alignment elements. Locations of the initial cuts with reference to the resistive alignment elements are determined by measuring resistances of the resistive alignment elements after the initial cuts.
公开/授权文献
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