发明授权
- 专利标题: Defect observing electron microscope
- 专利标题(中): 缺陷观察电子显微镜
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申请号: US477654申请日: 1995-06-07
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公开(公告)号: US5744800A公开(公告)日: 1998-04-28
- 发明人: Hiroshi Kakibayashi , Hisaya Murakoshi , Hidekazu Okuhira , Takashi Irie , Jiro Tokita , Keiichi Kanehori , Yasuhiro Mitsui
- 申请人: Hiroshi Kakibayashi , Hisaya Murakoshi , Hidekazu Okuhira , Takashi Irie , Jiro Tokita , Keiichi Kanehori , Yasuhiro Mitsui
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX6-128471 19940610
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; H01J37/26
摘要:
A transmission electron microscope makes it possible to search for defects without applying an undesirable treatment to a specimen by using a reference specimen prepared separately from a specimen to be observed. A pair of specimen holders detachable from the column of the electron microscope are adjacently arranged at upper and lower stages respectively along an electron beam axis to position the specimens closely to each other in an electron beam illuminating position. The pair of holders can be independently set to or removed from the electron beam illuminating position. The specimen holders include devices for selectively finely adjusting the spacing between the specimens, the angle of the specimen with respect to the electron beam axis and with respect to a plane perpendicular to the electron beam axis.
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