发明授权
US5747224A Stock developer solutions for photoresists and developer solutions
prepared by dilution thereof
失效
用于通过稀释制备的光致抗蚀剂和显影剂溶液的库存显影剂溶液
- 专利标题: Stock developer solutions for photoresists and developer solutions prepared by dilution thereof
- 专利标题(中): 用于通过稀释制备的光致抗蚀剂和显影剂溶液的库存显影剂溶液
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申请号: US630622申请日: 1996-04-10
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公开(公告)号: US5747224A公开(公告)日: 1998-05-05
- 发明人: Mitsuru Sato , Masakazu Kobayashi , Toshimasa Nakayama
- 申请人: Mitsuru Sato , Masakazu Kobayashi , Toshimasa Nakayama
- 申请人地址: JPX Kawasaki
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX6-83650 19940331
- 主分类号: G03F7/32
- IPC分类号: G03F7/32
摘要:
Stock developer solutions for photoresists contain an organic base free from metal ions and at least one compound having a specified weight average molecular weight that is selected from among polyethylene oxide compounds, polypropylene oxide compounds and ethylene oxide/propylene oxide adducts. The stock developer solutions may be diluted to requisite concentrations to prepare developer solutions for photoresists. By adding one or more of the specified compounds to the organic base free from metal ions, one can produce highly compatible stock developer solutions for photoresists that are concentrated, that have high stability in quality and that permit ease in handling and quality control. The stock developer solutions may be diluted to prepare developer solutions that are small in the tendency to foam and effective in defoaming, that assure uniform wetting and that are capable of forming resist patterns faithful to mask patterns.
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