Invention Grant
- Patent Title: Self-aligned method for forming a color display screen
- Patent Title (中): 用于形成彩色显示屏的自对准方法
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Application No.: US629116Application Date: 1996-04-08
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Publication No.: US5756241APublication Date: 1998-05-26
- Inventor: Nan-Chou David Liu , Jin-Yuh Lu
- Applicant: Nan-Chou David Liu , Jin-Yuh Lu
- Applicant Address: TWX Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TWX Hsin-Chu
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03F7/00 ; G03F7/20 ; H01J9/227 ; H01J29/28 ; H01J29/32 ; G03C5/00
Abstract:
For the manufacture of a color screen for a cathode ray tube a process is described which uses a single photolithographic mask for defining multiple patterns, so that said single mask may be used for determining the different areas where several different phosphor layers will be located. Masks used for conventional photolithographic processes normally comprise a pattern of regions that are either fully transparent or fully opaque to the radiation used for exposing the resist. The mask used as part of the present invention includes regions that are neither fully transparent nor fully opaque, having, instead, a grey scale of optical densities. Through careful control of both exposure and development time, selected parts of a layer of a positive photoresist, that were exposed through successively denser regions of the mask, can be successively removed. As each of these parts of the resist is removed, parts of an underlying layer of adhesive are uncovered and then serve as selective sites for the application of phosphor particles. The process may be used with or without the inclusion of a black matrix as part of the structure.
Public/Granted literature
- US5150557A Adjustable shoring system Public/Granted day:1992-09-29
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