发明授权
- 专利标题： Fault tolerant antireflective coatings
- 专利标题（中）： 容错抗反射涂层
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申请号： US584334申请日： 1996-01-11
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公开(公告)号： US5764416A公开(公告)日： 1998-06-09
- 发明人: John P. Rahn
- 申请人： John P. Rahn
- 申请人地址： CA Woodland Hills
- 专利权人： Litton Systems, Inc.
- 当前专利权人： Litton Systems, Inc.
- 当前专利权人地址： CA Woodland Hills
- 主分类号： G02B1/11
- IPC分类号： G02B1/11 ; G02B1/10 ; B05D5/06
摘要：
A narrow-band antireflective coating is comprised of a multilayer dielectric film formed on a dielectric substrate. The antireflective coating is initially formed so that its outer layer has a thickness greater than the thickness required for antireflection. The reflectivity is monitored while outer layer is reduced in thickness to reduce the thickness of the outer layer to reduce the reflectivity.
公开/授权文献
- USPP7738P Miniature rose named `Brisuzy` 公开/授权日：1991-12-10
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