Invention Grant
US5767405A Comb-drive micromechanical tuning fork gyroscope with piezoelectric
readout
失效
具有压电读数的梳齿驱动微机械音叉陀螺仪
- Patent Title: Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
- Patent Title (中): 具有压电读数的梳齿驱动微机械音叉陀螺仪
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Application No.: US584377Application Date: 1996-01-11
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Publication No.: US5767405APublication Date: 1998-06-16
- Inventor: Jonathan J. Bernstein , Marc S. Weinberg
- Applicant: Jonathan J. Bernstein , Marc S. Weinberg
- Applicant Address: MA Cambridge
- Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee Address: MA Cambridge
- Main IPC: G01C19/5719
- IPC: G01C19/5719 ; H03H9/02 ; G01P9/04
Abstract:
A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
Public/Granted literature
- US5090695A Exercise float and method of use Public/Granted day:1992-02-25
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