发明授权
US5767405A Comb-drive micromechanical tuning fork gyroscope with piezoelectric
readout
失效
具有压电读数的梳齿驱动微机械音叉陀螺仪
- 专利标题: Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
- 专利标题(中): 具有压电读数的梳齿驱动微机械音叉陀螺仪
-
申请号: US584377申请日: 1996-01-11
-
公开(公告)号: US5767405A公开(公告)日: 1998-06-16
- 发明人: Jonathan J. Bernstein , Marc S. Weinberg
- 申请人: Jonathan J. Bernstein , Marc S. Weinberg
- 申请人地址: MA Cambridge
- 专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址: MA Cambridge
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719 ; H03H9/02 ; G01P9/04
摘要:
A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
公开/授权文献
- US5090695A Exercise float and method of use 公开/授权日:1992-02-25
信息查询