发明授权
- 专利标题: Loading and unloading unit for polishing apparatus
- 专利标题(中): 抛光装置的装卸单元
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申请号: US677732申请日: 1996-07-08
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公开(公告)号: US5779426A公开(公告)日: 1998-07-14
- 发明人: Seiji Ishikawa , Takao Mitsukura
- 申请人: Seiji Ishikawa , Takao Mitsukura
- 申请人地址: JPX Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-196092 19950707
- 主分类号: B24B37/00
- IPC分类号: B24B37/00 ; B24B37/04 ; B24B37/30 ; B24B41/00 ; B24B47/02
摘要:
A polishing apparatus has a turntable and a top ring for gripping a semiconductor wafer to be polished by an abrasive cloth on the turntable. The polishing apparatus incorporates a loading and unloading unit having a supply holder for holding and supplying a semiconductor wafer to be polished to the top ring at a transfer position, and a reception holder for receiving a polished semiconductor wafer from the top ring at the transfer position. The reception holder and the supply holder are mounted on respective opposite ends of a support block which is angularly movable in a vertical plane by a turning mechanism for moving the supply holder and the reception holder alternatively to the transfer position.
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