Invention Grant
- Patent Title: Polishing/grinding method
- Patent Title (中): 抛光/研磨方法
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Application No.: US288213Application Date: 1994-08-09
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Publication No.: US5791972APublication Date: 1998-08-11
- Inventor: Yoshinori Murasugi , Akihiko Matoba , Kenji Fujiwara , Toru Imanari
- Applicant: Yoshinori Murasugi , Akihiko Matoba , Kenji Fujiwara , Toru Imanari
- Applicant Address: JPX Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JPX Tokyo
- Priority: JPX3-323846 19911112; JPX4-283047 19921021
- Main IPC: B24B13/005
- IPC: B24B13/005 ; G05B19/18 ; G05B19/418 ; B24B1/00
Abstract:
A method of working a workpiece with an apparatus comprising the steps of holding the workpiece by a holding means, rotating the held workpiece by a rotational means in a direction of a tool to match a rotational axis line of the workpiece with a rotation axis line of the tool, matching a vertical axis of the holding means holding the workpiece with an intersection of a swingable rotation axis line of a means for swingably rotating the tool and the tool rotation axis line, and holding the workpiece above the tool and the working the workpiece by exerting work pressure on the workpiece.
Public/Granted literature
- US4889657A Partial oxidation process Public/Granted day:1989-12-26
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