发明授权
- 专利标题： Polishing/grinding method
- 专利标题（中）： 抛光/研磨方法
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申请号： US288213申请日： 1994-08-09
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公开(公告)号： US5791972A公开(公告)日： 1998-08-11
- 发明人: Yoshinori Murasugi , Akihiko Matoba , Kenji Fujiwara , Toru Imanari
- 申请人： Yoshinori Murasugi , Akihiko Matoba , Kenji Fujiwara , Toru Imanari
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-323846 19911112; JPX4-283047 19921021
- 主分类号： B24B13/005
- IPC分类号： B24B13/005 ; G05B19/18 ; G05B19/418 ; B24B1/00
摘要：
A method of working a workpiece with an apparatus comprising the steps of holding the workpiece by a holding means, rotating the held workpiece by a rotational means in a direction of a tool to match a rotational axis line of the workpiece with a rotation axis line of the tool, matching a vertical axis of the holding means holding the workpiece with an intersection of a swingable rotation axis line of a means for swingably rotating the tool and the tool rotation axis line, and holding the workpiece above the tool and the working the workpiece by exerting work pressure on the workpiece.
公开/授权文献
- US4889657A Partial oxidation process 公开/授权日：1989-12-26
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