发明授权
- 专利标题: Packaging and interconnect system for integrated circuits
- 专利标题(中): 用于集成电路的封装和互连系统
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申请号: US621563申请日: 1996-03-25
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公开(公告)号: US5796164A公开(公告)日: 1998-08-18
- 发明人: Mark T. McGraw , Bradley L. Griswold , Chung W. Ho , Byoung-Youl Min , Michael I. Grove , William C. Robinette, Jr.
- 申请人: Mark T. McGraw , Bradley L. Griswold , Chung W. Ho , Byoung-Youl Min , Michael I. Grove , William C. Robinette, Jr.
- 申请人地址: CA Cupertino
- 专利权人: MicroModule Systems, Inc.
- 当前专利权人: MicroModule Systems, Inc.
- 当前专利权人地址: CA Cupertino
- 主分类号: H01L23/24
- IPC分类号: H01L23/24 ; H01L23/31 ; H01L23/538 ; H01L25/065 ; H01L23/34 ; H01L23/02 ; H01L23/28
摘要:
A thin MCM packaging structure and technique is provided in which a thin film decal interconnect circuit is fabricated on a thin aluminum wafer. The thin-film decal interconnect employs Au metallurgy for bonding and comprises a bond pad/ground plane layer, topside pads, and one or more routing layers. The top routing layer also acts as the pad layer along the edge of the interconnect structure. The underside of the decal interconnect structure is provided with metal pads for attachment to conventional aluminum or gold I/O pads on one surface of the integrated circuit die. A thermosonic bonding system is used to bond the die pads to the pads. The aluminum wafer is selectively removed forming one or more cavities to hold one or more die to be mounted on the MCM structure. The die are oriented with their pads in contact with contact pads on the thin-film decal interconnect to which they are bonded and the cavities are filled with a liquid encapsulant and cured. A leadframe has inner bond leads electrically bonded to bonding pads of the thin film multilayer interconnect circuit disposed about a periphery thereof and a multi-layer laminate board is mechanically bonded over the thin film multilayer interconnect circuit and over the inner bond leads of the lead frame and has a first layer including conductive pads extending outward from about an inner periphery thereof, and a second layer including apertures aligned with outwardly extending portions of the conductive pads.
公开/授权文献
- USD341775S Cleaning agent container 公开/授权日:1993-11-30
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