发明授权
- 专利标题: Heated stage for a scanning probe microscope
- 专利标题(中): 加热阶段用于扫描探针显微镜
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申请号: US729395申请日: 1996-10-11
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公开(公告)号: US5821545A公开(公告)日: 1998-10-13
- 发明人: Stuart M. Lindsay , Tianwei Jing
- 申请人: Stuart M. Lindsay , Tianwei Jing
- 申请人地址: AZ Tempe
- 专利权人: Molecular Imaging Corporation
- 当前专利权人: Molecular Imaging Corporation
- 当前专利权人地址: AZ Tempe
- 主分类号: G01Q30/02
- IPC分类号: G01Q30/02 ; G01Q30/10 ; G01Q30/14 ; G01Q30/20 ; H01J37/20 ; H01L35/00
摘要:
A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
公开/授权文献
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