发明授权
- 专利标题: Cascade scanning optical system
- 专利标题(中): 级联扫描光学系统
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申请号: US929003申请日: 1997-09-04
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公开(公告)号: US5828479A公开(公告)日: 1998-10-27
- 发明人: Masatoshi Takano , Eiji Takasugi , Shinji Kikuchi , Tsutomu Sato , Hiroyuki Saito , Yoshiyuki Araki , Mitsunori Iima , Takashi Sasaki , Takashi Iizuka
- 申请人: Masatoshi Takano , Eiji Takasugi , Shinji Kikuchi , Tsutomu Sato , Hiroyuki Saito , Yoshiyuki Araki , Mitsunori Iima , Takashi Sasaki , Takashi Iizuka
- 申请人地址: JPX Tokyo
- 专利权人: Asahi Kogaku Kogyo Kabushiki Kaisha
- 当前专利权人: Asahi Kogaku Kogyo Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-235401 19960905
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G02B13/00 ; G02B13/18 ; G02B26/12 ; H04N1/113 ; G02B26/08
摘要:
A cascade scanning optical system which includes: a pair of laser scanning optical systems each having a laser beam emitter and a laser beam deflector, wherein a laser beam emitted by the laser beam emitter enters the laser beam deflector so that the laser beam deflector deflects the laser beam to scan a surface of a member such that the laser beams proceed to the surface on a common line thereon in respective ranges of the common line; a pair of mirrors respectively provided in the pair of laser scanning optical systems, each of the pair of mirrors being positioned in a corresponding optical path between the laser beam deflector and the member to reflect a laser beam incident thereon toward the surface; a pair of cylindrical lenses having power in a sub-scanning direction, respectively provided in the pair of laser scanning optical systems, each of the pair of cylindrical lenses being positioned in a corresponding optical path between the laser beam emitter and the laser beam deflector; first means for adjusting an angle of at least one of the pair of mirrors relative to the surface; and second means for adjusting a position of at least one of the pair of cylindrical lenses relative to a corresponding one of the laser beam deflectors.
公开/授权文献
- US5310870A Fluoroalkene/hydrofluorocarbon telomers and their synthesis 公开/授权日:1994-05-10
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