发明授权
- 专利标题: Infrared optical bulk channel field effect transistor for greater effectiveness
- 专利标题(中): 红外光通道场效应晶体管效果更好
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申请号: US762961申请日: 1996-12-10
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公开(公告)号: US5838034A公开(公告)日: 1998-11-17
- 发明人: Yean-Kuen Fang , Fu-Yuan Chen , Jiann-Ruey Chen
- 申请人: Yean-Kuen Fang , Fu-Yuan Chen , Jiann-Ruey Chen
- 申请人地址: TWX Taipei
- 专利权人: National Science Council
- 当前专利权人: National Science Council
- 当前专利权人地址: TWX Taipei
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L29/78
摘要:
An infrared optical field effect transistor has been developed using a thin film of Lead Titanate (PbTiO.sub.3) deposited on a n/p.sup.+ Si substrate by RF magnetron sputtering. This transistor possesses excellent pyroelectric properties and can, therefore, be operated even at room temperature. The infrared optical field effect transistor has the following features associated with rapid bulk channel structure and higher mobility: 1. Can be operated at room temperature, unlike quantum type IR sensors which can only operate at very low temperature (-100.degree. C..about.-200.degree. C.), which results in higher costs. 2. High speed response with only 2.3 .mu.s of rise time. This is much faster than other types of thermal infrared optical field effect transistors. 3. Easy to fabricate an integrated sensor device.
公开/授权文献
- US4664894A Micronized zirconia and method for production thereof 公开/授权日:1987-05-12
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